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R. Phaal, C. J. P. Farrukh, and D. R. Probert, “Technology roadmapping – A ... S. P. Bates, “Silicon wafer processing” Applied Materials, Silicon_wafer_processing.pdf, ... technology” in ULSI Technology, edited by C. Y. Chang and S. M. Sze, .... pdf - R1 VLSI Technology : S M Sze ,Tata McGraw Hill pub R2 VLSI Fabrication Principles: Sorab K Gandhi, ... R6 ULSI Technology :Chang, SM Sze,Tata McGraw ... 3925e8d270

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